top of page
UROP
Since the winter of 2012, I have worked with Professor McDaniel designing and testing MEMS resonators. My responsibilities include drwaing the devices on paper, designing them in the layout software for manufacturing, testing, analysis, and redesign. I received the Lutchen Distinguished Fellowship award for the summer of 2013.
This project is challenging because of all the design restrictions, including dimension between layers, acceptable layer misalignment, fixed layer height and order of deposition, and micro-scale caveats, like negligible mass and 'sticktion' between surfaces.
![]() Run 103 subdie | ![]() SEM image of run 103 subdie |
---|---|
![]() Nitride, P0, P2 interface | ![]() Beam/pad interface |
![]() 1000 micron (1mm) resonator | ![]() The first resonance I found! |
![]() Another resonance | ![]() Populated/vacant PCBFrequency divider - signal at frequency F input, signal at frequency F/2 output. |
![]() Frequency divider on scope | ![]() Unforced Lattice |
![]() Mode at 2.12e7 Hz | ![]() Mode at 5.8e6 Hz |
![]() Mode at 1.76e7 Hz | ![]() The most recent submission1mm beams with periodic supports and lifting apparatus. |
bottom of page