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UROP

Since the winter of 2012, I have worked with Professor McDaniel designing and testing MEMS resonators. My responsibilities include drwaing the devices on paper, designing them in the layout software for manufacturing, testing, analysis, and redesign. I received the Lutchen Distinguished Fellowship award for the summer of 2013.

 

This project is challenging because of all the design restrictions, including dimension between layers, acceptable layer misalignment, fixed layer height and order of deposition, and micro-scale caveats, like negligible mass and 'sticktion' between surfaces.

Run 103 subdie

Run 103 subdie

SEM image of run 103 subdie

SEM image of run 103 subdie

Nitride, P0, P2 interface

Nitride, P0, P2 interface

Beam/pad interface

Beam/pad interface

1000 micron (1mm) resonator

1000 micron (1mm) resonator

The first resonance I found!

The first resonance I found!

Another resonance

Another resonance

Populated/vacant PCB

Populated/vacant PCB

Frequency divider - signal at frequency F input, signal at frequency F/2 output.

Frequency divider on scope

Frequency divider on scope

Unforced Lattice

Unforced Lattice

Mode at 2.12e7 Hz

Mode at 2.12e7 Hz

Mode at 5.8e6 Hz

Mode at 5.8e6 Hz

Mode at 1.76e7 Hz

Mode at 1.76e7 Hz

The most recent submission

The most recent submission

1mm beams with periodic supports and lifting apparatus.

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